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3: Lithographic patterning of positive and negative tone resists (Dark... | Download Scientific Diagram
Thick Resist Lithography | SpringerLink
Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm nodes
US9057960B2 - Resist performance for the negative tone develop organic development process - Google Patents
Chemical shrink materials and process for negative tone development (NTD) resist
Negative tone chemically amplified resist formulation optimizations for ultra high-resolution lithography - ScienceDirect
Photolithography and Photoresist | SpringerLink
Negative-tone chemically-amplified resist development for high resolution hybrid lithography - ScienceDirect
Patterning | Merck
Negative-tone molecular glass photoresist for high-resolution electron beam lithography | Royal Society Open Science
HSQ Resist Supplier- Negative tone EBL Resist - EM Resist
Compact modeling of negative tone development resist with photo decomposable quencher
Generic process flow for negative tone spacer double patterning. | Download Scientific Diagram
Positive vs. Negative Tone Photoresists
Willson Research Group - Water Soluble Resist
Positve-Tone vs Negative-Tone Photoresist - Hanna Naquines - OpenWetWare
Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm nodes
Recent advances in non-chemically amplified photoresists for next generation IC technology - RSC Advances (RSC Publishing) DOI:10.1039/C6RA12077F
Hexafluoroalcohol-functionalized Methacrylate Monomers for Lithographic/nanopatterning materials
Comparison of positive tone versus negative tone resist pattern collapse behavior: Journal of Vacuum Science & Technology B: Vol 28, No 6
Difference between the positive tone resist on the left and the... | Download Scientific Diagram
Chemical shrink materials and process for negative tone development (NTD) resist
